| 摘要 |
PROBLEM TO BE SOLVED: To enhance an accuracy of the vapor deposition patterning of an EL display panel. SOLUTION: A vapor deposition mask 12 is positioned between a vapor source 16 and a plastic substrate 10 and a vaporizing material from the vapor source 16 is selectively passed through an opening matching the pattern of a vapor deposition layer of an EL element formed on the mask 12, to form the vapor deposition layer on the plastic substrate 10. A material with a coefficient of thermal expansion about equal to (e.g. within±30%) that of the plastic substrate 10, for example, a plastic material such as polyimide, is used to make the vapor deposition mask. For heat resistance, the material should preferably have a heat resisting temperature about 50 deg.C higher than that of the plastic substrate 10. By using such a material for the mask, the plastic substrate can be heat deformed to approximately the same extent as the mask during vapor deposition, whereby the accuracy of deposition patterning can be enhanced.
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