| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method of treating a surface, which enables treatment by a treatment liquid, cleaning, and drying of a plate to be treated, by only a single apparatus of a simple structure. SOLUTION: In a surface treatment apparatus 1A, with an opposite face 31 of a vehicle 3 which is close to a treatment face 101 of a plate 100 to be treated, a treatment liquid T is supplied from treatment liquid outlet ports 62a-62h into a space 10 in between the treatment face 101 and the opposite face 31 of the vehicle 3 to treat the treatment face 101. Then, a cleaning liquid R is supplied from a cleaning liquid outlet port 72 for cleaning the treatment face 101. Then, with the plate 100 kept in a non-horizontal state, a surface active gas is supplied near a meniscus M of the cleaning liquid R formed at the higher side of the plate 100, to be treated from a gas outlet port (the treatment liquid outlet port 62a), formed in the vehicle 3. While the surface active gas is supplied, the vehicle 3 is pivoted about a part near the edge 102 at the lower side of the plate 100 to be treated as the pivoting center 30 for moving the meniscus M along the treatment face 101 toward the pivoting center 30 side to dry the treatment face 101.
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