METHOD FOR EVALUATING IMAGING PERFORMANCE OF TRANSFER/ EXPOSURE APPARATUS, METHOD FOR ADJUSTING TRANSFER/ EXPOSURE APPARATUS, AND PATTERN FOR EVALUATION

摘要

PROBLEM TO BE SOLVED: To provide a method for evaluating the imaging performance of a transfer/exposure apparatus which can adjust astigmatism and focus easily and efficiently. SOLUTION: A subfield 51 of an evaluating pattern 50 is divided into four regions S so that lines and spaces are extended in an X direction in regions S2 and S4, while the lines and spaces are extended in a Y direction in regions S1 and S3. When the pattern 50 for evaluation is transferred to develop a resist film, light and dark patterns are generated on a resist pattern. Imaging performance (astigmatism or focus) is compared by observing the light and dark patterns using an optical microscope.