Charging method of capacitor used in excimer laser, involves switching ON flywheel diode by residual energy of resonant inductor, such that inertial current flows into capacitor

摘要

The DC power supplied to a resonant inductor (5) for charging the capacitor (8), is stopped by bringing a switch (4) to OFF state, when a specific current/voltage relation is satisfied. A flywheel diode (3) is then switched ON by residual energy of the inductor, such that inertial current flows into capacitor through a switch (11) for charging capacitor to target voltage (V1). An Independent claim is also included for capacitor charging apparatus.