| 摘要 |
<p>A polish containing cerium oxide as a principal component, when dispersed in water in an amount of 10 % by mass, has a precipitate bulk specific density in the range of 0.8 g/ml to 1.0 g/ml, having a primary particle size in the range of 40nm to 80nm and a specific surface area in the range of 2m2/g to 5m2/g. The thus obtained polish provides the cerium-based polish and the cerium-based polish slurry that increase the polishing speed and cause few scratches inflicted on the surface of polish and achieve high quality of the polished surfaces.</p> |
