Manufacturing method and structure of slanting diffusive reflector

摘要

The invention discloses a manufacturing method and structure of slanting diffusive reflectors that simplifies their manufacturing process and reduces cost. The invention uses a photo mask comprising a plurality of half-tone exposure units. A half-tone photolithography process is performed on the positive photoresist formed on a substrate. Only one exposure process and a suitable drying step are required to form a plurality of slants and rough astigmatisms on the slants. The size of the half-tone exposure units is randomly selected. Each half-tone exposure unit comprises a plurality of parallel transmitting strips or shadow strips. The pitch of the transmitting strips or the shadow strips in one half-tone exposure unit can be arbitrary. The width of the shadow strips is gradually changing from one side of the half-tone exposure unit to the other side.