Pellicle and producing method of mask with pellicle

摘要

A pellicle comprises a pellicle frame, a pellicle film and at least two liners. The pellicle frame has one end face and the other end face and is provided at its central portion with an opening. The other end face of the pellicle frame is provided with an adhesion layer. The pellicle film is stretched over and attached to the one end face of the pellicle frame. The at least two liners are adhered on the adhesion layer. The at least two liners can be respectively peeled off from the adhesion layer, and when the at least two liners are respectively peeled off from the adhesion layer, a portion of the adhesion layer to which each of the liners was adhered is exposed.