| 摘要 |
A projection aligner transfers an image of a mask onto an object. The mask and the object are substantially parallel with each other. The project aligner has a light source that emits light in a predetermined direction. The light is directed toward the object through the mask. A deflection unit including first and second mirrors inserted in an optical path of the light directed from the mask to the object. An angle formed by the first and second mirrors of the deflection unit is greater than 180 degrees. The light reflected by the first mirror passes through the lens unit, is reflected by a mirror unit, and is deflected by the second mirror to the object. Optical paths of the light from the mask to the first mirror and the light from the second mirror to the object are substantially parallel with each other, and the deflection unit is driven in the predetermined direction.
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