发明名称 Semiconductor device and manufacturing method of the same
摘要 Concave portions and convex portions are formed on an insulating layer. First bit lines are arranged on the convex portions. A width of the first bit lines is set to L, and a space between the first bit lines is set to L+2S. Each of the first bit lines is electrically connected to a drain diffusion layer by a contact plug. Second bit lines are arranged in a trench between the first bit lines. A width of the second bit lines is set to L, and a space between the first and second bit lines is equal to a width S of a side wall. Each of the second bit lines is electrically connected to a drain diffusion layer by a contact plug.
申请公布号 US2003094632(A1) 申请公布日期 2003.05.22
申请号 US20020186173 申请日期 2002.06.28
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KOBAYASHI KAZUHITO;FUKUZAKI YUZO
分类号 H01L21/3205;H01L21/8242;H01L23/522;H01L27/02;H01L27/108;(IPC1-7):H01L21/82;H01L27/10 主分类号 H01L21/3205
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