发明名称 |
FIELD EFFECT TRANSISTOR SENSOR |
摘要 |
The invention relates to a sensor, especially for the probe of a screen probe microscope, for examining probe surfaces or areas adjacent to the sensor, comprising at least one field effect transistor (FET) made of at least one semiconductor material. The invention also relates to a hall sensor made of at least one semiconductor material for detecting magnetic fields and whose lateral resolution capacity can be electrically adjusted, in addition to a semiconductor electrode whose electrode surface can be electrically adjusted. |
申请公布号 |
WO03042627(A2) |
申请公布日期 |
2003.05.22 |
申请号 |
WO2002EP12513 |
申请日期 |
2002.11.08 |
申请人 |
UNIVERSITAET KASSEL;EDINGER, KLAUS;RANGELOW, IVAJLO;GRABIEC, PIOTR;MELNGAILIS, JOHN |
发明人 |
EDINGER, KLAUS;RANGELOW, IVAJLO;GRABIEC, PIOTR;MELNGAILIS, JOHN |
分类号 |
G01N27/82;G01Q60/30;G01Q70/10;G01R1/07;G01R33/06 |
主分类号 |
G01N27/82 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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