Monitoring of the position of a moving part, especially a piston, in a processing tool, whereby the monitoring apparatus is isolated from the processing tool itself to minimize interference effects and improve measurement accuracy

摘要

Position monitoring system for working components, the moving parts of which initiate work processes. The movement of the components is detected using sensors. The system has a non- magnetic guide part with a guide path in which a position detecting rod (5) slides up and down. The guide path has dovetailed grooves (8) in which position detection sensors (10) are inserted.