MEMS switch for high power applications, has solid-state switch connected in parallel with MEMS switch and connected to signal path

摘要

The switch includes a deflection beam (130) fixed to a substrate (120), an attracted plate (140) fixed to the deflection beam, a first signal path plate fixed to the substrate, and a second signal path plate attached to the deflection beam. A dielectric (180) is fixed to the first or the second signal path plate. The signal path plates are connected to a signal path so that if the first and second plate are directly proximate to each other, the signal path is closed. A solid state switch is connected in parallel with the MEMS switch (100) and is connected to the signal path. An Independent claim is also included for a method of operating a MEMS switch.