发明名称 |
Polishing apparatus, polishing method, control program for causing computer to execute polishing, and recording medium |
摘要 |
A polishing apparatus includes a table on which a polishing target member is placed, and at least one nozzle which sprays a polishing solution to a surface of the polishing target member so as to form, by polishing, the surface of the polishing target member. The nozzle and the polishing target member move relative to each other, and an angle of the nozzle is changeable.
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申请公布号 |
US2003096562(A1) |
申请公布日期 |
2003.05.22 |
申请号 |
US20020310627 |
申请日期 |
2002.12.05 |
申请人 |
OLYMPUS OPTICAL CO., LTD. |
发明人 |
KUROGOUCHI TOSHIO |
分类号 |
B24C3/04;B24B13/00;B24B13/06;B24C1/08;B24C3/00;(IPC1-7):B24B7/00;B24B5/00;B24B9/00;B24B29/00;B24B57/00 |
主分类号 |
B24C3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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