New bis-o-nitrophenol derivatives, with tert.-butoxycarbonyl protecting groups, used for production of poly-o-hydroxyamide and/or polybenzoxazole polymers for use in microelectronics, e.g. as dielectrics

摘要

Bis-o-nitrophenol derivatives, where at least one phenolic hydroxyl group is optionally substituted with a tert.-butoxycarbonyl group, are new. Bis-o-nitrophenol derivatives (A), where at least one phenolic hydroxyl group is optionally substituted with a tert.-butoxycarbonyl group of formula (I), are new. -CO-O-CR<3>R<4>R<5> (I) R<3>-R<5> = H, F, -(CH2)nCH3 or -(CF2)nCF3, with the proviso that at least one group is not H; and n = 0-10 Independent claims are included for: (1) poly-o-hydroxyamides and/or polybenzoxazoles obtained from (A); (2) material based on compounds (A) and/or the above polymers for microelectronic components; and (3) microelectronic components containing this material.