| 发明名称 |
WAFER SUPPORT ATTACHMENT FOR A SEMI-CONDUCTOR WAFER TRANSPORT CONTAINER |
| 摘要 |
A wafer container (100) for supporting semi-conductor wafer disks. Wafer supports (120, 122) are positioned within an enclosure portion (102) having a plurality of vertically stacked shelves for defining slots (124, 126). The wafer supports are secured within the enclosure portion rigidly at the bottom margin and resiliently at the top margin. |
| 申请公布号 |
WO03042073(A1) |
申请公布日期 |
2003.05.22 |
| 申请号 |
WO2002US36407 |
申请日期 |
2002.11.13 |
| 申请人 |
ENTEGRIS, INC.;EGGUM, SHAWN, D. |
发明人 |
EGGUM, SHAWN, D. |
| 分类号 |
B65D25/10;B65D77/26;B65D85/86;H01L21/673;(IPC1-7):B65D85/90 |
主分类号 |
B65D25/10 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
