MEMS DEVICE HAVING ELECTROTHERMAL ACTUATION AND RELEASE AND METHOD FOR FABRICATING

摘要

MEMS device 100 having an electrothermal actuator 126 and release and a method for fabrication. According to one embodiment, a microscale switch 100 is provided and can include a substrate 102 and a stationary electrode 106 and stationary contact 104 formed on the substrate 102. The switch 100 can further include a movable microcomponent 108 suspended above the substrate 102. The microcomponent 108 can include a structural layer 112 including at least one end fixed with respect to the substrate 102. The microcomponent 108 can further include a movable electrode 118 spaced from the stationary electrode 106. The microcomponent 108 can include an electrothermal component 126 attached to the structural layer 112 and operable to produce heating for generating force for moving the structural layer 112.