Micromechanical device with damped microactuator

摘要

A damped micromechanical device comprising a housing provided with an internal fluid-tight chamber and an electrically-driven microactuator disposed in the fluid-tight chamber. The microactuator has a movable structure capable of being moved between first and second positions at a resonant frequency. A damping fluid is disposed in the fluid-tight chamber for damping the movement of the movable structure at the resonant frequency.