Ceramic heaters, a method for producing the same and heating apparatuses used for a system for producing semiconductors

摘要

An object of the present invention is to provide a novel ceramic heater having a ceramic substrate with a heating face and a heat generator so that the temperature on the heating face may be controlled without the necessity of a temperature controlling member separate from the substrate. A ceramic heater 1B has a ceramic substrate 2 with a surface 2A and a heat generator 3. The surface 2A includes a heating face 2a, a first region 15 provided out of the heating face 2a and a second region 13 provided out of the heating face 2a. The second region 13 has an emissivity of thermal radiation lower than that of the first region 15.