发明名称 CHEMICAL RINSE COMPOSITION
摘要 The present invention relates to a thinner composition for removing resist used in TFT−LCD manufacturing processes, and more particularly to a thinner composition for removing resist that comprises : a) 0.1 to 5wt% of an inorganic alkali compound; b) 0.1 to 5wt% of an organic amine; c) 0.1 to 30wt% of an organic solvent; d) 0.01 to 5wt% of a surfactant comprising an ionic surfactant and a non−ionic surfactant in the weight ration of 1:5 to 1:25; and e) 60 to 99wt% of water. The thinner composition for removing resist of the present invention has good efficiency of removing unwanted resist film constituents formed on the edge of the resist film or at the back of the substrate in TFT−LCD device and semiconductor device manufacturing processes. Also, it does not have the problem of equipment corrosion.
申请公布号 WO03042762(A1) 申请公布日期 2003.05.22
申请号 WO2002KR02117 申请日期 2002.11.13
申请人 SAMSUNG ELECTRONICS CO., LTD.;CHAI, YUNG-BAE;CHOI, SI-MYUNG;RO, JAE-SUNG;CHOI, JUNG-SUN 发明人 CHAI, YUNG-BAE;CHOI, SI-MYUNG;RO, JAE-SUNG;CHOI, JUNG-SUN
分类号 G03F7/42;C11D1/14;C11D1/70;C11D1/72;C11D1/722;C11D1/83;C11D3/02;C11D3/04;C11D3/06;C11D3/08;C11D3/10;C11D3/20;C11D3/28;C11D3/30;C11D3/32;C11D3/43;C11D10/02;C11D11/00;G03F7/16;G03F7/32;H01L21/027;H01L21/304 主分类号 G03F7/42
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