HERSTELLUNGSVERFAHREN VON OPTOELEKTRONISCHEN BAUELEMENTEN

摘要

PCT No. PCT/BE93/00019 Sec. 371 Date Apr. 11, 1994 Sec. 102(e) Date Apr. 11, 1994 PCT Filed Apr. 22, 1993 PCT Pub. No. WO93/22793 PCT Pub. Date Nov. 11, 1993.A method of fabricating a plurality of optoelectronic components on a semiconductor substrate, each optoelectronic component comprising several layers grown in a reactor. Every layer is being grown under a predetermined individual pressure. The active layers of all the components are lying substantially at the same height. Control of the pressure in the reactor during growth allows the thickness of the layer grown to be constant or to vary over the substrate area.