发明名称 Process and device for treatment by dielectric barrier discharge lamps
摘要 To advantageously eliminate the disadvantage of attenuation of the radiant light from dielectric barrier discharge lamps by a UV transmission component, a treatment device using dielectric barrier discharge lamps is provided with a lamp chamber in which dielectric barrier discharge lamps are located and in which there is an inert gas atmosphere; a treatment chamber, in which an article to be treated is located, is provided with a treatment gas atmosphere, and a UV transmission component by which the lamp chamber and the treatment chamber are separated from one another. In each of the lamp chamber and the treatment chamber there are devices for determining the gas pressure within the respective chamber, a supply arrangement for delivering gas to the inside the respective chamber and an arrangement for discharging gas from the respective chamber. A control device regulates the pressure of the gas atmosphere within the lamp chamber and the pressure of the gas atmosphere of the treatment chamber relative to one another by determining the gas pressures of the lamp chamber and the treatment chamber.
申请公布号 US2003094909(A1) 申请公布日期 2003.05.22
申请号 US20020292630 申请日期 2002.11.13
申请人 USHIODENKI KABUSHIKI KAISHA 发明人 HISHINUMA NOBUYUKI
分类号 G21K5/00;B01J19/12;B08B7/00;C23C16/48;G21K5/04;H01J65/00;H05B3/00;(IPC1-7):H05B41/16 主分类号 G21K5/00
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