| 摘要 |
PURPOSE: To provide a vacuum pump which can prevent breakage of a rotating body caused by corrosion, and maintain the balance of the rotating body for a long time. CONSTITUTION: This vacuum pump comprises a pump case 1 with a gas intake port opened in an upper surface thereof, a rotor shaft 5 rotatably supported in the pump case 1, a plurality of rotor blades 10, etc., which are accommodated in the pump case 1 and integrated with an outer circumferential surface of a rotor 8 fixed to the rotor shaft 5, a plurality of stator blades 11, etc., which are alternately positioned between the plurality of rotor blades 10, etc., and fixed in the pump case 1, and a drive motor 9 to rotate the rotor shaft 5. A corrosion preventive film by the electroless plating is formed on an inner circumferential surface 8b and an outer circumferential surface 8a of the rotor 8, and a heat-resistant and corrosion-resistant adhesive 15a is applied to the inner circumferential surface 8b of the rotor 8 as a mass adding means 15. |
