| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxygen sensor having excellent gas responsiveness and shortening time to reach a prescribed temperature and time to activation by efficiently transmitting heat from a heater substrate to a sensor substrate, and uniformizing the temperature of the sensor substrate. SOLUTION: This oxygen sensor is constituted by laminating and fixing the sensor substrate 1 provided with a sensor forming part A formed with a pair of porous reference electrode 4 and measuring electrode 5 in the opposed positions of at least the inner and outer surfaces of a zirconia solid electrolyte base body 3, and the heater substrate 2 formed of an alumina insulator 7 with a built-in heating body 8. When the length of the measuring electrode 5 is set to a, and the length of the heating body 8 is set to b, b/a is to satisfy 1.05-1.5. Further, a distance L from the heating body 8 to the surface of the heater substrate 2 on the fixed side of the sensor substrate 1 is set to 100-600 μm, the curvature of the sensor substrate 1 and heater substrate 2 is respectively set to 0.2 mm or less, and a clearance S between the sensor substrate 1 and heater substrate 2 is set to 0.5 mm or less. |
