LIGHT SOURCE PART UNIT FOR SUBSTRATE PROCESSING DEVICE, AND THE SUBSTRATE PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a light source part unit for substrate processing device and a substrate processing device which irradiate substrates at a time with a fixed light source and has superior light intensity stability and a superior distribution characteristic. SOLUTION: The processing device is equipped with a light source part which irradiates the substrate of a reaction tank part with light and the reaction tank part where the substrate to be processed is arranged and irradiates the substrate with the light by the light source part and processes the substrate by using a light-excited electrochemical reaction method. The light source is equipped with at least one kind of light source, which is made a unit.