| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic beam-testing system for judging whether a signal without any potential change is high or low before a DC signal or timing to be observed. SOLUTION: In the electronic beam-testing system, electron beams are applied to a semiconductor integrated circuit device to be analyzed for acquiring potential contrast to be analyzed. The system comprises a tester 14 for supplying a test pattern signal for analysis to the semiconductor integrated circuit device and at the same time holding the supply test pattern at given timing, an electron gun 15 for applying electron beams to the semiconductor integrated circuit device which being related to the hold, and a detector for taking in the potential contrast of the semiconductor integrated circuit device that is illuminated with the electron beams.
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