PROBE HEAD FOR DEVICE UTILIZING NEAR FIELD LIGHT AND ITS UTILIZING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a probe head for device utilizing near field light capable of generating the near field light and controlling the distance and the inclination by providing distance controlling function and inclination detecting function on an identical probe base or an identical SIL lens in addition to the near field light generation function of a conventional optical waveguide and a SIL, and to provide a light fine processing device and a measurement/diagnostic device using the probe head. SOLUTION: An optical waveguide 1a for light fine processing is provided on the center of the base plate 1 side surface, with optical waveguides 1b and 1c for distance measuring arranged respectively on the two sides, a metallic film 8 is evaporated on the under surface of the base plate 1 besides the optical waveguide 1c and the light exit part, and a fine opening 9 is provided at the position corresponding to the light exit of the optical waveguide 1a of the metallic film 8.