SCANNING PROBE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a scanning probe microscope having a function of discriminating the kinds of probes with an image recognition function in the scanning probe microscope having an optical microscope. SOLUTION: This scanning probe microscope having the optical microscope capable of observing a prove is equipped with an image sensor for taking in an optical microscope image as a digital image; and a processing device processing the image taken in.