METHOD OF MANUFACTURING FINE METALLIC PARTS

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing fine metallic parts which can inexpensively manufacture the fine metallic parts having sharp corner edges in particular, excellent perpendicularity in a height direction and a high aspect ratio in a large amount with good reproducibility with smaller process steps. SOLUTION: An electroforming mold EM of a shape obtained by fixing a mold 3 having fine through-hole patterns 3a on a conducive substrate 2 across a conductive film 1 consisting of a conductive paste 1' containing metallic powder of 1μm or below in average grain size is used and plating films are selectively grown by electroplating on the conductive film 1 exposed in the segments of the through-hole patterns 3a, by which the fine metallic parts 4 are manufactured.