发明名称 Toroidal low-field reactive gas source
摘要 An apparatus for dissociating gases is provided the apparatus comprising: a. a plasma chamber (20;100) comprising a gas; b. a transformer (12) having a magnetic core (16) surrounding a portion of the plasma chamber and a primary winding (18); and c. a solid state AC switching power supply comprising one or more switching transistors (268) coupled to a voltage supply (256) and having an output coupled to the primary winding, the solid state AC switching power supply driving an AC current in the primary winding, the current inducing an AC potential inside the chamber that directly forms a toroidal plasma (270) that completes a secondary circuit of the transformer and dissociates the gas. <IMAGE>
申请公布号 EP1313128(A1) 申请公布日期 2003.05.21
申请号 EP20030002613 申请日期 1998.06.23
申请人 APPLIED SCIENCE & TECHNOLOGY, INC. 发明人 SMITH, DONALD, K.;CHEN, XING;HOLBER, WILLIAM;GEORGELIS, ERIC
分类号 H05H1/46;H01J27/16;H01J37/32;H01L21/205;H01L21/302;H01L21/3065 主分类号 H05H1/46
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