PLASMA-RESISTANT MEMBER AND METHOD OF PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a plasma resistant member which resists sufficiently even when it is exposed to plasma and which is produced at a reduced cost, and to provide a method of producing the same. SOLUTION: The plasma-resistant member is characterized in that the surface area to be exposed to plasma under a corrosive gas atmosphere is formed by using a zirconia-based sintered compact in which 7 to 17 mol.% yttria is contained in a dispersed state. It is preferable that the center line average roughness (Ra) being one of properties of the surface area is 1.2 to 5.0 μm. The value of the center line average roughness (Ra) in such a range is easily obtained by etching the surface area with an etching solution containing hydrofluoric acid.