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发明名称
METHOD AND DEVICE FOR DETECTING RESIDUE ON A POLISHED WAFER
摘要
申请公布号
EP1311831(A2)
申请公布日期
2003.05.21
申请号
EP20010975706
申请日期
2001.08.07
申请人
THERMA-WAVE, INC.
发明人
STANKE, FRED, E.
分类号
G01N21/31;G01N21/94;G01N21/95;(IPC1-7):G01N21/88
主分类号
G01N21/31
代理机构
代理人
主权项
地址
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