CONTACT SHEET FOR INSPECTING SEMICONDUCTOR WAFER

摘要

PROBLEM TO BE SOLVED: To propose the structure of a contact sheet for inspecting a semiconductor wafer that is suitable for reliably performing a plurality of burn-in inspections, and is effective for avoiding inspection failure accompanied by the oxidation of a contactor pad in inspection. SOLUTION: The contact sheet is made of an insulating resin sheet where a nonporous conductive post is essentially buried, and the end face of the post is exposed in a state that nearly coincides with the sheet surface in the contact sheet for inspecting a semiconductor wafer.