| 摘要 |
PROBLEM TO BE SOLVED: To measure the surface physical properties of a sample without being influenced by the variation of contact areas by securing the contact area between a probe and the sample, preventing plastic deformation, and seizing the contact area in a scanning probe microscope. SOLUTION: Fine particles are dispersed on the surface of the sample, a surface irregularity image is measured, a probe of a cantilever is moved onto the fine particles, the distance between the cantilever and the sample is vibrated to ensure the contact area with the sample surface, and the displacement response of the cantilever is obtained. By measuring the surface irregularity, the sizes of the dispersed fine particles are measured, and the contact area with the sample surface is identified. By attaching the fine particles having known sizes to the tip of the probe, the surface physical properties on the surface of the attached sample are measured.
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