| 摘要 |
PROBLEM TO BE SOLVED: To provide an eddy current type displacement sensor for magnetic bearing suitable as a displacement sensor for detecting the displacement of an object to be supported by a magnetic levitation device used under an extremely low temperature. SOLUTION: This displacement sensor is provided with a displacement sensor winding 3 and a sensor target 2 opposed to the displacement sensor winding 3, and detects the displacement of an object to be supported by the magnetic levitation support device for magnetically levitating and supporting the object to be supported under an extremely low temperature. The displacement sensor winding 3 is wound on and fixed to a magnetic pole 4 consisting of a laminated type magnetic material or a magnetic material hardly generating an eddy current. The sensor target 2 opposed to the displacement sensor winding 3 is the object to be supported (rotating shaft 8) or a sleeve fixed to the object to be supported, and the frequency of a carrying signal to be supplied to the displacement sensor winding 3 is set to several tens KHz or more and MHz order or less.
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