OPTICAL THIN FILM, ITS MANUFACTURING METHOD, OPTICAL ELEMENT USING OPTICAL THIN FILM, OPTICAL SYSTEM, AND IMAGE PICKUP DEVICE, RECORDING DEVICE AND EXPOSURE DEVICE PROVIDED WITH OPTICAL SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an optical thin film prevented from being cracked and peeled and having high durability, a method for manufacturing the optical thin film by balancing the stress of the whole thin films at the time of forming the thin film by laminating a thin film material having a high refractive index and a thin film material having a low refractive index, an optical element using the optical thin film, an optical system, and an image pickup device, a recording device and an exposure device respectively provided with the optical system. SOLUTION: In the case of forming the optical thin film by laminating one or more combinations of the thin film material having the high refractive index and the thin film material of the low refractive index, these thin film materials are combined and laminated so that the stresses of the materials are cancelled by each other.