METHOD FOR MANUFACTURING SEMICONDUCTOR-INSPECTING APPARATUS AND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a semiconductor-inspecting apparatus for preventing a probe from being damaged in handling by retaining a probe surface where the probe is formed. SOLUTION: When the probe 4 is to be formed, a probe protection projection 5 whose tip area is larger than that of the tip in the probe 4 is also formed. Additionally, in a positioning groove formation process for forming a positioning groove, the probe protection projection 5 is removed.