| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an instrument that eliminate dispersion of a measured value for surface roughness caused by measuring instruments. SOLUTION: This surface roughness measuring instrument is provided with a pair of fixed rails 1, 2 fixed to a base, laid rails 3, 4 laid between the fixed rails 1, 2, and a stage 5 supported on the laid rails 3, 4. The stage 5 is moved while selecting properly linear moving to a direction along the fixed rails 1, 2 accompanied to moving of the laid rails 3, 4 or rotational moving on the rails 3, 4, or combining the both, so as to measure the surface roughness of the a measuring object mounted on the stage 5. Measurement-required positions of the measuring object are moved to a measuring position measured by a surface roughness measuring sensor 6 respectively, without moving the stage 5 to a direction along the laid rails 3, 4 on the rails 4, 4.
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