Microelectromechanical optical isolators

摘要

An opto-isolator (10) incorporating a MEMS device (16) includes an optical signal source (12) and an optical signal detector (14) defining therebetween an optical path for communication of optical signals. A MEMS device (16) having an actuator (22) for controlling a moveable element (18) is disposed between the source and detector for manipulating the optical signals. In one embodiment, the moveable element is a shutter which is operable to selectively allow optical signals to be received by the detector and prevent signals from being detected. In another embodiment, the moveable member is a MEMS tilt mirror for selectively directing optical signals to the detector.