| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanner driving method for a scanning probe microscope for avoiding the influence of an error resulted from the scanning of the probe or the sample in a circular arcuate shape. SOLUTION: An X-axis driving signal generating part 10 generates an X-axis driving signal 14, and outputs to a voice coil motor 1 used for the X-axis driving to drive the X-axis of the scanner and to send as well to aΔZ computing part 13. TheΔZ computing part 13 receives the X-axis driving signal 14 and calculates the current scanning position X, and calculates a correction parameterΔZ from the X and the length value R of a driving body part 4 in the Z-axial direction stored in a length value R storage part 12 and sends to a Z-axis driving signal generating part 11. The Z-axis driving signal generating part 11 carries out the correction using theΔZ received, and sends the corrected Z-axis driving signal 15 to a voice coil motor 3 used for the Z-axis driving to drive the Z-axis of the scanner.
|
