DEVICE AND METHOD FOR MANUFACTURING MULTILAYER FILM OPTICAL FILTER

摘要

PROBLEM TO BE SOLVED: To solve a problem that the characteristics of a DWDM multilayer film optical filter having many layers are deteriorated due to the variation of a filming speed or the ruggedness or the like of a deposition material by dropping a deposition substrate stuck to a shutter on the deposition material at the time of preliminary heating of the evaporation material during the filming of the filter. SOLUTION: Since a part 30 at least opposed to the evaporation material 20 out of the shutter 10 covering the material 20 is constituted of the same substance of the material 20, the variation of the filming speed and the ruggedness of the deposition material are not generated because a deposited substance dropped at the time of preliminary heating is constituted of the same material as the desposition material. Consequently the multilayer film optical filter having high characteristics can be stably manufactured.