| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a mass flow meter for reducing production costs, and to provide a mass flow controller using the mass flow meter. SOLUTION: In the mass flow meter 3, a bypass channel 1 for bypassing fluid and a sensor channel 2 for measuring the flow rate of the fluid are provided in parallel. The bypass channel 1 comprises a hole 19 having a nearly circular section, a guide post 20 that is arranged so that the axis center nearly coincides with that of the hole 19, and a spiral plate 21 that is provided spirally along the outer periphery of the guide post 20 while the outer periphery surface comes into contact with the inner wall of the hole 19.</p> |
