发明名称 SEMICONDUCTOR DEVICE, A METHOD OF MANUFACTURING THE SAME, AND A SEMICONDUCTOR DEVICE PROTECTIVE CIRCUIT
摘要 The present invention relates to a Schottky diode, and aims at providing a structure having no P-N junction while improving voltage resistance against a reverse bias in a Schottky diode employed in combination with an insulated gate semiconductor device in particular. In order to attain the aforementioned object, a P-type impurity region (12) having a surface exposed on a surface of an N-type semiconductor substrate (11) functioning as a drain for functioning as a channel region and a gate insulator film (32) covering it are provided. A gate electrode (53) is extended from above the gate insulator film (32) over a first taper of an oxide film (31). In a Schottky diode (103) rendering the semiconductor substrate (11) a cathode and having a boundary layer (14) as a Schottky region, on the other hand, an anode electrode (53) is extended from above the boundary layer (14) over a second taper of the oxide film (31) existing above an end portion of the boundary layer (14). <IMAGE>
申请公布号 EP1041643(A4) 申请公布日期 2003.05.21
申请号 EP19980947795 申请日期 1998.10.08
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 TAKAHASHI, HIDEKI;TOMINAGA, SHUUICHI
分类号 H01L21/285;H01L21/311;H01L21/329;H01L29/06;H01L29/40;H01L29/739;H01L29/78;H01L29/872 主分类号 H01L21/285
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