发明名称 |
SEMICONDUCTOR DEVICE, A METHOD OF MANUFACTURING THE SAME, AND A SEMICONDUCTOR DEVICE PROTECTIVE CIRCUIT |
摘要 |
The present invention relates to a Schottky diode, and aims at providing a structure having no P-N junction while improving voltage resistance against a reverse bias in a Schottky diode employed in combination with an insulated gate semiconductor device in particular. In order to attain the aforementioned object, a P-type impurity region (12) having a surface exposed on a surface of an N-type semiconductor substrate (11) functioning as a drain for functioning as a channel region and a gate insulator film (32) covering it are provided. A gate electrode (53) is extended from above the gate insulator film (32) over a first taper of an oxide film (31). In a Schottky diode (103) rendering the semiconductor substrate (11) a cathode and having a boundary layer (14) as a Schottky region, on the other hand, an anode electrode (53) is extended from above the boundary layer (14) over a second taper of the oxide film (31) existing above an end portion of the boundary layer (14). <IMAGE> |
申请公布号 |
EP1041643(A4) |
申请公布日期 |
2003.05.21 |
申请号 |
EP19980947795 |
申请日期 |
1998.10.08 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
TAKAHASHI, HIDEKI;TOMINAGA, SHUUICHI |
分类号 |
H01L21/285;H01L21/311;H01L21/329;H01L29/06;H01L29/40;H01L29/739;H01L29/78;H01L29/872 |
主分类号 |
H01L21/285 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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