| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a turbo-molecular pump which can easily achieve the compatibility between models without providing any circuit to limit the compatibility of the models not only on a pump unit A side but also on a power source unit B side, and achieve the joint use of the power source unit B, and a turbo- molecular pump model determining method. SOLUTION: The turbo-molecular pump has a table memory (a storage unit) 50 to save a plurality of kinds of control parameters to control a plurality of kinds of pump units A, a model determining circuit (a model determining means) 48 to determine the model of the pump units A based on the detection signal of a position sensor 24, and a table selection circuit (a selecting means) 49 to select the control parameters according to the determined model. The model determining circuit 48 can determine the model based on an offset signal, a gain, or the like of the position sensor 24.</p> |
