TERMINAL FOR MEASURING ELECTRIC AND ELECTRONIC CHARACTERISTICS OF SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING THE TERMINAL

摘要

PROBLEM TO BE SOLVED: To provide a terminal for electric/electronic measurement that can repeat the contact with the electrode of a semiconductor device without any cleaning or by extremely reducing the chance of cleaning. SOLUTION: A carbon ion of 1×10<16> ions/cm<2> or higher, and 1×10<19> ions/cm<2> or less is injected into the surface of a terminal 1 that is brought into contact with the electrode of a semiconductor device, thus preventing the surface from being scratched, preventing foreign objects from being adhered, and preventing the alloying of terminal constituents and electrode constituents.