| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic EL element manufacturing apparatus which can efficiently perform the moving operation of a metal material evaporation source to supply a metal electrode material and an energization operation to a heat source while preventing the function of an organic thin film layer from being impaired at high temperature. SOLUTION: A power source side terminal 40 with an anode 41 and a cathode 42 separately disposed thereon from each other is provided in a vacuum chamber 15, and the power source side terminal 40 is urged in the returning direction by the restoration force based on the deformation of a spring 43. A metal material evaporation source 50 has connection terminals 52 and 53 which can be brought into contact with each power source side terminal 40 at the elevated position of an elevating/lowering tray 54, and a heating wire 51 stretched between the connection terminals 52 and 53. The metal material evaporation source 50 is connected or disconnected when it is driven in the advancing/ retracting direction to/from the power source side terminal 40, and directly heats the metal electrode material 18 at the temperature required for evaporation when the metal material evaporation source is connected.
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