DEVICE FOR POSITIONING DISK-SHAPED OBJECTS,申请号EP20010937297-传众专利搜索

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发明名称	DEVICE FOR POSITIONING DISK-SHAPED OBJECTS
摘要
申请公布号	EP1311826(A1)	申请公布日期	2003.05.21
申请号	EP20010937297	申请日期	2001.05.10
申请人	BROOKS AUTOMATION GMBH;BROOKS AUTOMATION, INC.	发明人	KONIG, JOACHIM;KRUGER, STEFFEN;ZIMMER, BJOERN;HEINZE, MANFRED
分类号	G01B21/00;G01N21/84;G01N21/95;G01N21/956;G12B5/00;H01L21/68;(IPC1-7):G01N21/01	主分类号	G01B21/00
代理机构		代理人
主权项
地址

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