| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent any deflection, troubles, or the like in a movable arm or the like to support a suction pad by reducing the weight of the suction pad to such and carry a plate-like article such as a semiconductor wafer. SOLUTION: In the suction pad 1 having at least a suction unit 7 to suck and hold the plate-like article and a frame 8 to surround the suction unit, the suction unit 7 and the frame 8 are formed of porous ceramic, and a shielding film 8a to prevent any air leakage is applied to the frame 8.</p> |
