发明名称 |
Capacitive pressure sensor |
摘要 |
A high-accuracy high-stability capacitor type pressure sensor which eliminates a parasitic capacitance between a reference capacitor and a semiconductor substrate. A capacitor type pressure sensor comprising, on a semiconductor substrate 10, an active capacitor 100 whose capacitance varies as the surrounding pressure varies, a reference capacitor 200 whose capacitance will not vary substantially as the surrounding pressure varies, and a circuit which is electrically connected to both said active and reference capacitors 100 and 200, detects the difference or ratio thereof, and uses the potential of a semiconductor substrate, wherein an electrode 30a of said reference capacitor is formed on the semiconductor substrate 10 with a dielectric 20 therebetween.
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申请公布号 |
US6564643(B1) |
申请公布日期 |
2003.05.20 |
申请号 |
US20010807325 |
申请日期 |
2001.04.12 |
申请人 |
HITACHI, LTD.;HITACHI CAR ENGINEERING CO., LTD. |
发明人 |
HORIE JUNICHI;MIYAZAKI ATSUSHI;SHIMADA SATOSHI;SAITOU AKIHIKO;ONOSE YASUO;ICHIKAWA NORIO;HANZAWA KEIJI |
分类号 |
G01L9/12;G01L9/00;H01L29/84;(IPC1-7):G01L9/12 |
主分类号 |
G01L9/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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