发明名称 Ultrasonic bonding method
摘要 When connecting electrodes of a chip device CP are ultrasonic-bonded to circuit electrodes provided for a resin substrate 10 to mount the chip device CP on the resin substrate 10, a heater 5 for heating the resin substrate 10 is provided with which the temperature of the resin substrate 10 is raised to a level with which the ratio of elastic modulus epsih realized when heat is supplied with respect to elastic modulus epsir of the resin substrate 10 at room temperature satisfies 1>epsih/epsir>=0.5. The heater 5 may be provided for the substrate retaining frame 4.
申请公布号 US6565687(B2) 申请公布日期 2003.05.20
申请号 US20020191057 申请日期 2002.07.10
申请人 TDK CORPORATION 发明人 GOTOH MASASHI;KANAZAWA JITSUO;HARA HIROKI
分类号 H01L21/60;H01L21/607;(IPC1-7):B32B31/00 主分类号 H01L21/60
代理机构 代理人
主权项
地址