| 摘要 |
In the design of a lens system, lens parameters are determined by minimizing a merit function which is a sum of squares of ray aberrations or wavefront errors at many sampling points. Prior methods often select the parameters which give very narrow tolerances to production errors. The small tolerance increases the difficulty of production. In order to increase the tolerances, states which allot errors ±delta to some chosen parameters are considered. Merit functions corresponding the error-allotted states are made. An integrated merit function is produced by adding the error-allotted merit functions to the non-error allotted normal merit function. Parameters are determined by minimizing the integrated merit function. The optimized parameters will give wider tolerances for the error-allotted parameters. DOE (diffraction optical elements) design includes the steps of considering error-allotted states S1, S2, . . . in addition to a non-error state S0, making merit functions E1, E2, . . . for S1, S2, . . . besides E0 for S0, defining an integrated merit function E=SIGMAwkEk by multiplying the merit function with weights and summing up, minimizing the integrated merit function and determining optimum variables for the DOE. |
